Graphene transfer approaches with different support materials on the substrates with cavities için kapak resmi
Graphene transfer approaches with different support materials on the substrates with cavities
Başlık:
Graphene transfer approaches with different support materials on the substrates with cavities
Yazar:
Duman, Sinem, author.
Yazar Ek Girişi:
Fiziksel Tanımlama:
xii, 56 leaves: color illustraltions, charts. .+ 1 computer laser optical disc.
Özet:
A micro capacitive sensor characteristically embraces a thin conductive membrane which is freely suspended above an immovable counter electrode in a parallel plate geometry. Such capacitive structures are found in broad range of applications as a transducer like capacitive micro-machined ultrasonic transducer (CMUT), pressure sensor, resonator and biological or chemical material sensing element. The input can be an ultrasound wave, pressure, chemical or biological mass attachment which result in the deflection of the membrane. Emerging nano materials have shown great potential as candidates for generation of nano and micro electromechanical systems (NEMS, MEMS). Among these nano materials, graphene is regarded as a promising material because of its ultra low mass, thickness, high surface to volume ratio, flexibility, and extraordinary electrical and mechanical properties. However, the transfer of graphene on substrates with micro scale cavities is challenging since the fabrication of large area membranes with a smaller air gap often results in membrane tearing or collapse driven by capillary or electrostatic forces. This study presents a research on the fabrication and the characterization of graphene membranes to be used in micro capacitive sensor applications. Substrates which span a large array of circular and hexagonal micro cavities between 2-100 μm in diameter are fabricated. Graphene transfer with different support materials are studied to fabricate graphene micro membranes. Up to 5 μm diameter membranes on 300 nm deep cavities are demonstrated via scanning electron microscope (SEM) and atomic force microscope (AFM) tools.
Konu Başlığı:
Yazar Ek Girişi:
Tek Biçim Eser Adı:
Thesis (Master)--İzmir Institute of Technology: Electronics and Communication Engineering.

İzmir Institute of Technology: Electronics and Communication Engineering--Thesis (Master).
Elektronik Erişim:
Access to Electronic Versiyon.
Ayırtma: Copies: