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Büyükköse, Serkan.
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SiOx substrates with DC magnetron sputtering method. Thin films were characterized via x-ray
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Köseoğlu, Hasan.
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photolithography, magnetron sputtering and reactive ion beam etching techniques, the mesas with size of 40-100x300
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Tuna, Öcal.
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Tin Oxide (ITO) thin films were grown by both DC and RF magnetron sputtering techniques. To know
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Kır, Serap.
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deposited on to Si/SiO2/Al2O3 substrates by DC magnetron sputtering. In this study, the effective parameters
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