Aberration-Corrected Analytical Transmission Electron Microscopy -- Contents -- List of Contributors -- Preface -- 1 General Introduction to Transmission Electron Microscopy (TEM) -- 1.1 What TEM Offers -- 1.2 Electron Scattering -- 1.2.1 Elastic Scattering -- 1.2.2 Inelastic Scattering -- 1.3 Signals which could be Collected -- 1.4 Image Computing -- 1.4.1 Image Processing -- 1.4.2 Image Simulation -- 1.5 Requirements of a Specimen -- 1.6 STEM Versus CTEM -- 1.7 Two Dimensional and Three Dimensional Information -- 2 Introduction to Electron Optics -- 2.1 Revision of Microscopy with Visible Light and Electrons -- 2.2 Fresnel and Fraunhofer Diffraction -- 2.3 Image Resolution -- 2.4 Electron Lenses -- 2.4.1 Electron Trajectories -- 2.4.2 Aberrations -- 2.5 Electron Sources -- 2.6 Probe Forming Optics and Apertures -- 2.7 SEM, TEM and STEM -- 3 Development of STEM -- 3.1 Introduction: Structural and Analytical Information in Electron Microscopy -- 3.2 The Crewe Revolution: How STEM Solves the Information Problem -- 3.3 Electron Optical Simplicity of STEM -- 3.4 The Signal Freedom of STEM -- 3.4.1 Bright-Field Detector (Phase Contrast, Diffraction Contrast) -- 3.4.2 ADF, HAADF -- 3.4.3 Nanodiffraction -- 3.4.4 EELS -- 3.4.5 EDX -- 3.4.6 Other Techniques -- 3.5 Beam Damage and Beam Writing -- 3.6 Correction of Spherical Aberration -- 3.7 What does the Future Hold? -- 4 Lens Aberrations: Diagnosis and Correction -- 4.1 Introduction -- 4.2 Geometric Lens Aberrations and Their Classification -- 4.3 Spherical Aberration-Correctors -- 4.3.1 Quadrupole-Octupole Corrector -- 4.3.2 Hexapole Corrector -- 4.3.3 Parasitic Aberrations -- 4.4 Getting Around Chromatic Aberrations -- 4.5 Diagnosing Lens Aberrations -- 4.5.1 Image-based Methods -- 4.5.2 Ronchigram-based Methods -- 4.5.3 Precision Needed -- 4.6 Fifth Order Aberration-Correction -- 4.7 Conclusions.

5 Theory and Simulations of STEM Imaging -- 5.1 Introduction -- 5.2 Z-Contrast Imaging of Single Atoms -- 5.3 STEM Imaging Of Crystalline Materials -- 5.3.1 Bright-field Imaging and Phase Contrast -- 5.3.2 Annular Dark-field Imaging -- 5.4 Incoherent Imaging with Dynamical Scattering -- 5.5 Thermal Diffuse Scattering -- 5.5.1 Approximations for Phonon Scattering -- 5.6 Methods of Simulation for ADF Imaging -- 5.6.1 Absorptive Potentials -- 5.6.2 Frozen Phonon Approach -- 5.7 Conclusions -- 6 Details of STEM -- 6.1 Signal to Noise Ratio and Some of its Implications -- 6.2 The Relationships Between Probe Size, Probe Current and Probe Angle -- 6.2.1 The Geometric Model Revisited -- 6.2.2 The Minimum Probe Size, the Optimum Angle and the Probe Current -- 6.2.3 The Probe Current -- 6.2.4 A Simple Approximation to Wave Optical Probe Size -- 6.2.5 The Effect of Chromatic Aberration -- 6.2.6 Choosing αopt in Practice -- 6.2.7 The Effect of Making a Small Error in the Choice of αopt -- 6.2.8 The Effect of α On the Diffraction Pattern -- 6.2.9 Probe Spreading and Depth of Field -- 6.3 The Condenser System -- 6.4 The Scanning System -- 6.4.1 Principles of the Scanning System -- 6.4.2 Implementation of the Scanning System -- 6.4.3 Deviations of the Scanning System From Ideality -- 6.4.4 The Relationship Between Pixel Size and Probe Size -- 6.4.5 Drift, Drift Correction and Smart Acquisition -- 6.5 The Specimen Stage -- 6.6 Post-Specimen Optics -- 6.7 Beam Blanking -- 6.8 Detectors -- 6.8.1 Basic Properties of a Detector -- 6.8.2 Single and Array Detectors -- 6.8.3 Scintillator/Photomultiplier Detector -- 6.8.4 Semiconductor Detectors -- 6.8.5 CCD Cameras -- 6.9 Imaging Using Transmitted Electrons -- 6.9.1 The Diffraction Pattern -- 6.9.2 Coherent Effects in the Diffraction Pattern -- 6.9.3 Small Angular Range - Bright Field and Tilted Dark Field Images.

6.9.4 Medium Angular Range - MAADF -- 6.9.5 High Angular Range - HAADF -- 6.9.6 Configured Detectors -- 6.10 Signal Acquisition -- Acknowledgements -- 7 Electron Energy Loss Spectrometry and Energy Dispersive X-ray Analysis -- 7.1 What is EELS and EDX? -- 7.1.1 Basics of EDX -- 7.1.2 Basics of EELS -- 7.1.3 Common Features For Analytical Spectrometries -- 7.2 Analytical Spectrometries in the Environment of the Electron Microscope -- 7.2.1 Instrumentation for EDX -- 7.2.2 EELS Instrumentation -- 7.2.3 Microscope Instrumentation for Analytical Spectroscopies -- 7.3 Elemental Analysis and Quantification Using EDX -- 7.4 Low Loss EELS - Plasmons, IB Transitions and Band Gaps -- 7.5 Core Loss EELS -- 7.5.1 Elemental Quantification -- 7.5.2 Near-Edge Fine Structure For Chemical and Bonding Analysis -- 7.5.3 Extended-Edge Fine Structure For Bonding Analysis -- 7.6 EDX and EELS Spectral Modelling -- 7.6.1 Total Spectrum Modelling -- 7.6.2 EELS Modelling of Near Edge Structures and also the Low Loss -- 7.7 Spectrum Imaging: EDX and EELS -- 7.8 Ultimate Spatial Resolution of EELS -- 7.9 Conclusion -- 8 Applications of Aberration-Corrected Scanning Transmission Electron Microscopy -- 8.1 Introduction -- 8.2 Sample Condition -- 8.3 HAADF Imaging -- 8.3.1 Imaging of Isolated Atoms -- 8.3.2 Line Defects (1-D) -- 8.3.3 Interfaces and Extended Defects (2-D) -- 8.3.4 Detailed Particle Structures (3-D) -- 8.3.5 Low-loss EELS -- 8.3.6 Core-loss EELS and Atomic-scale Spectroscopic Imaging -- 8.4 Conclusions -- 9 Aberration-Corrected Imaging in CTEM -- 9.1 Introduction -- 9.2 Optics and Instrumentation for Aberration-Corrected CTEM -- 9.2.1 Aberration-Correctors -- 9.2.2 Related Instrumental Developments -- 9.3 CTEM Imaging Theory -- 9.3.1 CTEM Image Formation -- 9.3.2 The Wave Aberration Function -- 9.3.3 Partial Coherence -- 9.4 Corrected Imaging Conditions.

9.4.1 The Use of Negative Spherical Aberration -- 9.4.2 Amplitude Contrast Imaging -- 9.5 Aberration Measurement -- 9.5.1 Aberration Measurement From Image Shifts -- 9.5.2 Aberration Measurement from Diffractograms -- 9.5.3 An Alternative Approach to Aberration Measurement -- 9.6 Indirect Aberration Compensation -- 9.7 Advantages of Aberration-Correction for CTEM -- 9.8 Conclusions -- Acknowledgements -- Appendix A: Aberration Notation -- Appendix B: General Notation -- Index.