Handbook of cleaning for semiconductor manufacturing : fundamentals and applications
Başlık:
Handbook of cleaning for semiconductor manufacturing : fundamentals and applications
Yazar:
Reinhardt, Karen A.
ISBN:
9781613441770
9781118071731
9780470625958
9781118071748
9781118099513
9781283374590
9786613374592
Yazar Ek Girişi:
Yayın Bilgileri:
Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., ©2011.
Fiziksel Tanımlama:
1 online resource (xxii, 590 pages) : illustrations
Seri:
Wiley-Scrivener ; v.48
Wiley-Scrivener.
Notlar:
O'Reilly
Yazar Ek Girişi:
Ayırtma: Copies: