MICRO/NANO REPLICATION: Processes and Applications -- CONTENTS -- Preface -- 1. Introduction -- 1.1 Introduction -- 1.2 Micro/Nano Replication -- 1.3 Application Fields of Micro/Nano Replicated Parts -- 1.3.1 Optical Data Storage Devices -- 1.3.2 Display Fields -- 1.3.3 Other Industries -- 1.4 Required Technologies for Micro/Nano Replication -- References -- 2. Patterning Technology for Micro/Nanomold Fabrication -- 2.1 Material Removal Process -- 2.1.1 Mechanical Machining -- 2.1.2 Laser Ablation -- 2.1.3 Silicon Etching Process -- 2.1.4 Focused Ion Beam Patterning -- 2.2 Lithography Process -- 2.2.1 Electron Beam Lithography -- 2.2.2 Photolithography -- 2.2.3 Reflow Method -- 2.2.3.1 Fabrication of a Mother Lens -- 2.2.3.2 Empirical Equation for the Volume Change Ratio of a Reflow Lens -- 2.2.3.3 Verification of the Model -- 2.2.4 Laser Interference Lithography -- 2.2.4.1 Theory of Laser Interference Lithography -- 2.2.4.2 Simulation of Laser Interference Lithography -- 2.2.4.3 Experimental Setup -- 2.2.4.4 Fabrication of Nanostructures Using Laser Interference Lithography under Different Process Conditions -- 2.3 Electroforming Processes -- 2.3.1 Theory of Electroforming Process -- 2.3.2 Electroforming Results -- 2.3.2.1 Metallic Mold for a Microlens Array -- 2.3.2.2 Metallic Mold for Patterned Media -- References -- 3. Modification of Mold Surface Properties -- 3.1 Introduction -- 3.2 Thiol-Based Self-Assembled Monolayer -- 3.2.1 Thiol-Based Self-Assembled Monolayer and Deposition Process -- 3.2.2 Experiment Results and Analysis -- 3.2.3 The Changing Properties of SAM at Actual Replication Environment -- 3.2.4 Analysis of Replicated Polymeric Patterns -- 3.3 Silane-Based Self-Assembled Monolayer -- 3.3.1 Silane-Based Self-Assembled Monolayer -- 3.3.2 Deposition Process of Silane-Based Self-Assembled Monolayer.

3.3.3 Self-Assembled Monolayer on Polymer Mold -- 3.3.4 Analysis of Replicated Polymeric Patterns -- 3.4 Dimethyldichlorosilane Self-Assembled Monolayer -- References -- 4. Micro/Nanoinjection Molding with an Intelligent Mold System -- 4.1 Introduction -- 4.2 Effects of the Mold Surface Temperature on Micro/Nanoinjection Molding -- 4.3 Theoretical Analysis of Passive/Active Heating Methods for Controlling the Mold Surface Temperature -- 4.3.1 Mathematical Modeling and Simulation -- 4.3.2 Passive Heating -- 4.3.3 Active Heating -- 4.4 Fabrication and Control of an Active Heating System Using an MEMS Heater and an RTD Sensor -- 4.4.1 Construction of an Intelligent Mold System -- 4.4.2 Control System for the Intelligent Mold System -- 4.4.2.1 Kalman Filter Observer of the Thermal Plant -- 4.4.2.2 LQGI Controller -- 4.4.2.3 Performance of the Constructed Control System -- 4.5 Replication of a High-Density Optical Disc Substrate Using the Intelligent Mold System -- References -- 5. Hot Embossing of Microstructured Surfaces and Thermal Nanoimprinting -- 5.1 Introduction -- 5.2 Development of Microcompression Molding Process -- 5.3 Temperature Dependence of Anti-Adhesion Between a Mold and the Polymer in Thermal Imprinting Processes -- 5.3.1 Defects in Replicated Micro-Optical Elements -- 5.3.2 Analysis of Polymer in Process Condition of Thermal Imprinting -- 5.3.3 Analysis of Replication Quality Fabricated in Different Peak Temperature -- 5.4 Fabrication of a Micro-Optics Using Microcompression Molding with a Silicon Mold Insert -- 5.4.1 Fabrication of Microlens Components Using Si Mold Insert -- 5.4.2 Analysis of Refractive Microlens -- 5.5 Fabrication of a Microlens Array Using Microcompression Molding with an Electroforming Mold Insert -- 5.5.1 Fabrication of Microlens Components Using Ni Mold Insert -- 5.5.2 Analysis of Replication Quality.

5.6 Application of Microcompression Molding Process -- 5.6.1 Fabrication of a Microlens Array Using Microcompression Molding -- 5.6.2 Fabrication of Metallic Nanomold and Replication of Nanopatterned Substrate for Patterned Media -- References -- 6. UV-Imprinting Process and Imprinted Micro/Nanostructures -- 6.1 Introduction -- 6.2 Photopolymerization -- 6.3 Design and Construction of UV-Imprinting System -- 6.4 UV-Transparent Mold -- 6.5 Effects of Processing Conditions on Replication Qualities -- 6.6 Controlling of Residual Layer Thickness Using Drop and Pressing Method -- 6.7 Elimination of Microair Bubbles -- 6.8 Applications -- 6.8.1 Wafer Scale UV Imprinting -- 6.8.2 Diffractive Optical Element -- 6.8.3 Roll-to-Roll Imprint Lithography Process -- 6.9 Conclusion -- References -- 7. High-Temperature Micro/Nano Replication Process -- 7.1 Fabrication of Metal Conductive Tracks Using Direct Imprinting of Metal Nanopowder -- 7.1.1 Introduction -- 7.1.2 Direct Patterning Method Using Imprinting and Sintering -- 7.1.3 Imprinting and Sintering System -- 7.1.4 Defect Analysis and Process Design -- 7.1.5 Analysis of Imprinted Conductive Tracks -- 7.1.6 Conclusions -- 7.2 Glass Molding of Microlens Array -- 7.2.1 Introduction -- 7.2.2 Fabrication of Master Patterns -- 7.2.3 Fabrication of Tungsten Carbide Core for Microglass Molding -- 7.2.3.1 Fabrication Process of Tungsten Carbide Core -- 7.2.3.2 Measurement of Shrinkage After Sintering Process -- 7.2.4 Surface Finishing and Coating Process of Tungsten Carbide Core -- 7.2.5 Comparison of Surface Roughness Before and After Finishing Process -- 7.2.6 Fabrication of Glass Microlens Array by Microthermal Forming Process -- 7.2.7 Measurement and Analysis of Optical Properties of Formed Glass Microlens Array -- References -- 8. Micro/Nano-Optics for Light-Emitting Diodes -- 8.1 Designing an Initial Lens Shape.

8.1.1 LED Illumination Design -- 8.1.2 Source Modeling -- 8.1.3 Modeling a Spherical Refractive Lens -- 8.1.4 Modeling a Micro-Fresnel Lens -- 8.1.5 Verifying the Micro-Fresnel Lens Performance -- 8.2 Fabrication Results and Discussion -- 8.2.1 Fabrication of the Micro-Fresnel Lens -- 8.2.2 Elimination of Air Bubbles -- 8.2.3 Optimization of the UV-Imprinting Process -- 8.2.4 Evaluation of the Micro-Fresnel Lens for LED Illumination -- 8.3 Conclusions -- References -- 9. Micro-/Nano-Optics for Optical Communications -- 9.1 Fiber Coupling Theory -- 9.2 Separated Microlens Array -- 9.2.1 Design -- 9.2.2 Fabrication -- 9.2.3 Measurement Results -- 9.3 Integrated Microlens Array -- 9.3.1 Design -- 9.3.2 Fabrication -- 9.3.3 Measurement Results -- 9.4 Conclusions -- References -- 10. Patterned Media -- 10.1 Introduction -- 10.2 Fabrication of a Metallic Nano Mold Using a UV-Imprinted Polymeric Master -- 10.3 Fabrication of Patterned Media Using the Nano Replication Process -- 10.4 Fabrication of Patterned Media Using Injection Molding -- 10.5 Measurement and Analysis of Magnetic Domains of Patterned Media by Magnetic Force Microscopy -- 10.6 Conclusions -- References -- 11. Optical Disk Drive (ODD) -- 11.1 Introduction -- 11.2 Improvements in the Optical and Geometrical Properties of HD-DVD Substrates -- 11.3 Effects of the Insulation Layer on the Optical and Geometrical Properties of the DVD Mold -- 11.4 Optimized Design of the Replication Process for Optical Disk Substrates -- 11.5 Conclusions -- References -- 12. Biomedical Applications -- 12.1 Introduction -- 12.2 GMR-Based Protein Sensors -- 12.2.1 Principle of GMR Protein Sensors -- 12.2.2 Principle of Guided-Mode Resonance Effect -- 12.2.3 Nano Replication Process of a GMR Protein Chip for Mass Production -- 12.2.4 Feasibility Test of GMR Protein Chip -- 12.3 Conclusions -- References -- Index.