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Maluf, Nadim.

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Analysis Systems 89 -- Actuators and Actuated Microsystems 116 -- Summary 128 -- CHAPTER 5 MEM Structures

Bao, Minhang.

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. Electrostatic Actuation -- 4.1. Electrostatic Forces -- 4.2. Electrostatic Driving of Mechanical Actuators -- 4

Maloberti, Franco.

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-- 1.4.1 Sensors -- 1.4.2 Actuators -- 1.5 WHAT IS THE ROLE OF THE COMPUTER? -- 1.6 GOAL AND LEARNING

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