by
Ata, Bengü, author.
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optimizing the oxygen concentration, sputtering power and deposition time. Samples which show the maximum
2.
by
Köseoğlu, Hasan, author.
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of oxygen partial pressure and ITO film thickness to adopt them as a transparent electrode in
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by
Yüce, Hürriyet, author.
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deposition time. To obtain single VO2 phase, optimum oxygen rate was investigated with various analysis
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